Reactor system
TW202635934APending Publication Date: 2026-09-01ASM IP HLDG BV
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Patent Information
- Application Number
- TW114148595
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-16
- Filing Date
- 2025-12-11
- Publication Date
- 2026-09-01
Smart Images
Figure TWG2TA001074860_001 
Figure TWG2TA001074860_002 
Figure TWG2TA001074860_003
Abstract
A reactor system can comprise a remote plasma unit, a reactor coupled to the remote plasma unit, and / or an activated species supply system. The reactor can comprise a reaction chamber, a diffuser in fluid communication with the reaction chamber, and / or a mixer coupled to, and in fluid communication with, the diffuser. The mixer can comprise a mixing chamber and a mixer fluid channel fluidly coupled to, and upstream of, the mixing chamber. The activated species supply system can comprise an activated species supply conduit that fluidly couples the remote plasma unit with the mixer.
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