Gas-processing systems and methods

TW202635939APending Publication Date: 2026-09-01ENTEGRIS INC
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Patent Information

Application Number
TW115120298
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-03-11
Filing Date
2023-03-10
Publication Date
2026-09-01

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Abstract

Described are gas-processing systems that include a media vessel and a pre-heater, that are used to process a gas by flowing the gas to contact media contained in the media vessel, such as a catalyst or adsorbent material, and related methods.
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