Method and system of growing and using cesium lithium borate crystals
TW202635961APending Publication Date: 2026-09-01KLA CORP
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Patent Information
- Application Number
- TW114150396
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-12-09
- Filing Date
- 2025-12-22
- Publication Date
- 2026-09-01
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Abstract
A method and system for growing a cesium lithium borate (CsLiB6O10) crystal is provided. Lasers and characterization systems incorporating a cesium lithium borate crystal grown according to the method disclosed herein are also provided. The method includes growing a crystal from a melt that contains chloride (Cl-) ions. These crystals have lower defect density and contain fewer OH groups and / or less water than crystals grown by conventional techniques and so are suitable for use at high powers and short deep UV wavelengths. A frequency conversion apparatus and an optical system containing a frequency conversion apparatus are also provided.
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