Methods for obtaining position offset and system for obtaining position offset

TW202636074APending Publication Date: 2026-09-01NIKON CORP
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Patent Information

Application Number
TW115119888
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2021-06-28
Filing Date
2022-06-23
Publication Date
2026-09-01

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Abstract

A shape acquisition method that can easily obtain shape information of an object without using light includes: steps of acquiring information on the tilt angle of the object at multiple points using multiple tilt sensors installed on the object (steps S2 and S4); and a step of calculating the shape information of the object by using the tilt angle information acquired at the multiple points (step S5). none
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