Monitoring method, and monitoring system

Abstract

A method can comprise heating a source vessel comprising a solid precursor to a predetermined temperature; subliming a first portion of the solid precursor in the source vessel to produce a precursor gas; flowing the precursor gas through a gas line connecting the source vessel with a destination vessel; measuring, by a first pressure sensor coupled to the gas line, a pressure value of the precursor gas flowing through the gas line; and / or determining a first amount of the solid precursor that flowed from the source vessel to the destination vessel based on the pressure value. Determining the first amount of the solid precursor can comprise inputting the measured pressure value into a predetermined function of pressure versus precursor transfer rate.

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