Inspection device and inspection method

Abstract

The objective of this invention is to select a better position for alignment of the registration pattern. The inspection apparatus 1 of this invention registers a registration pattern Pk for alignment within a plurality of patterns P formed on the inspected object A in a reference image K. In the inspection image, it detects a detection pattern Pj similar to the registration pattern within the plurality of patterns formed on the inspected object A. Based on the position Lj of the detection pattern in the inspection image and the position Lk of the registration pattern Pk in the reference image, the inspection image and the reference image are aligned. The inspection apparatus uses a temporary registration pattern Q temporarily registered within the plurality of patterns on the inspected object as a reference. It then overlays a plurality of captured images g obtained by photographing the inspected object for each product to synthesize a composite image G. To determine whether the temporary registration pattern is suitable as a registration pattern, it calculates the difference E between the plurality of captured images constituting the composite image.

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