Methods and apparatus for radiation examination

Abstract

The X-ray inspection method of the present invention includes: a first control step, which controls the incident position of the electron beam EB on the target material 22, which generates X-rays by incident electron beam EB, from a first incident position Y1 to a second incident position Y2; a second irradiation step, which emits the electron beam EB towards the second incident position Y2 of the target material 22 to irradiate the structure disposed on the mounting substrate SB with X-rays; and a second image acquisition step, which acquires an X-ray image of the structure disposed on the mounting substrate SB, i.e., a second image.

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