Fast scanning acoustic microscopy for subsurface imaging and inspection
TW202636114APending Publication Date: 2026-09-01APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114143935
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-11-07
- Filing Date
- 2025-11-11
- Publication Date
- 2026-09-01
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Abstract
Embodiments of the present disclosure relate to fast scanning acoustic microscopy for subsurface imaging and inspection. For example, a system may include at least one processing device configured to perform operations including initiating imaging of a sample using an acoustic microscope, and causing the sample to be scanned at a radial distance relative to a center position of the sample to perform the imaging of the sample. The sample is located on a stage, and the stage rotates at a rotational speed determined based on the radial distance.
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