Hybrid structure and inspection device including same

Abstract

This invention provides a composite structure that prevents peeling from occurring on the inner wall of the first through hole even when the conductive gas contact needle repeatedly performs sliding movements, and also prevents inspection errors caused by the falling of peeled particles. Therefore, its electrical connection has high reliability. Furthermore, the structure in which the first through hole is formed is formed with sufficient thickness, thereby providing an environment that reduces signal attenuation under high-frequency signals. Thus, it can improve the reliability and accuracy of the inspection device and an inspection device equipped with the composite structure.

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