Probe structure and inspection apparatus

Abstract

In order to achieve impedance matching of the connection terminals serving as relay points in signal circuits, the present invention provides and receives high-frequency signals between itself and the tested object via a contact portion that makes electrical contact with the electrodes of the tested object. The probe structure includes: a body, a substrate holding member, a connector, and an impedance adjustment section. The substrate holding member has a wiring substrate on one surface and is fixed to the body; the connector engages with the wiring substrate of the substrate holding member and connects the wiring of the wiring substrate to a coaxial cable via a connection terminal; the impedance adjustment section adjusts the gap between itself and the connection terminal to achieve impedance matching.

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