Optical beam member

TW202636478APending Publication Date: 2026-09-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW114148328
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-12-04
Filing Date
2025-12-10
Publication Date
2026-09-01

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Abstract

An optical beam member is for a charged particle-optical device configured to direct a charged particle beam along a charged particle-optical axis of the charged particle-optical device and towards a sample location. The optical beam member comprises a plurality of emitter arrangements configured to emit respective optical beams towards the sample location. A first beam aperture is defined in the optical beam member for passage of the charged particle beam towards the sample location. The plurality of emitter arrangements are arranged adjacent the first beam aperture and are configured to emit the respective optical beams to form a combined optical beam towards the sample location.
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