Semiconductor process apparatus, methods for operating the same, and semiconductor process system

TW202636484APending Publication Date: 2026-09-01ADVANCED SEMICON ENG INC
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Patent Information

Application Number
TW114106265
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-20
Publication Date
2026-09-01

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Abstract

The present disclosure provides a semiconductor process apparatus. This semiconductor process apparatus includes a chamber, a platform for supporting a workpiece to be processed, and a lifting device. The platform is disposed below the chamber. The lifting device is connected to the platform and configured to adjust the height of the platform, such that the platform is combined with the chamber.
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