Semiconductor device

Abstract

A semiconductor device is described including a substrate with a cell active pattern, a cell gate structure positioned on the cell active pattern, and a bit line structure connected to the cell active pattern. The cell gate structure includes a cell gate insulating layer positioned on the cell active pattern, a cell gate conductive layer positioned on the cell gate insulating layer, and a cell gate capping layer positioned on the cell gate conductive layer and including an insulating material and hydrogen.