Process result prediction methods, information processing devices and programs

Abstract

[Problem] To provide a technique for "improving the prediction accuracy of a prediction model that predicts process result information based on a process recipe". [Solution] A process result prediction method performed by an information processing device, characterized by: extracting a plurality of feature items from a data set of process recipes that "establishes a correspondence between the process recipe and the process log of a substrate processing device that performs the process according to the process recipe, and the process result information of the substrate processing device that performs the process according to the process recipe"; selecting feature items for classification of the data set from the plurality of feature items received by the operator; and predicting process result information using a prediction model for each classification "obtained by machine learning using a data set consistent with the feature items selected by the operator".

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