Information acquisition system, computing device, and information acquisition method of substrate processing apparatus

Abstract

[Problem] Regarding a substrate processing apparatus for liquid treatment of a substrate, this invention aims to prevent undesirable processing conditions caused by improper positioning of the nozzle or cup relative to the substrate. [Solution] An information acquisition system acquires information about a substrate processing apparatus comprising a substrate holding section that holds the substrate and allows it to rotate, a nozzle that supplies processing liquid to the surface of the rotating substrate, and a cup surrounding and holding the substrate in the substrate holding section. The system comprises: an information acquisition body that holds the substrate in place of the substrate by the substrate holding section; an imaging unit of the information acquisition body for capturing an image of the cup and acquiring image data; and an acquisition unit that acquires information about the height of the cup based on the image data.

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