Wafer boat

TW202636897APending Publication Date: 2026-09-01ASM IP HLDG BV
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Patent Information

Application Number
TW115102500
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-27
Filing Date
2026-01-22
Publication Date
2026-09-01

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Abstract

A wafer boat is disclosed. The wafer boat comprises two side rods and at least one back rod, the rods extending substantially vertically between a top member and a bottom member. The rods comprise vertically spaced apart support formed at corresponding heights, each support extending away from the respective boat rods towards a central axis of the wafer boat. Each support has a wafer support surface for contacting a wafer, the wafer support surface being a polished surface, and each wafer support surface is terminated by two rounded corners.
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