Loading port and handling system

Abstract

This invention relates to a loading port and a handling system for miniaturizing the loading port. The loading port includes: a placement portion for placing a container; a storage portion disposed below the placement portion; a port door capable of holding the container; a baffle having an opening for removing and placing a substrate; and a lifting mechanism for raising and lowering the port door relative to the opening. The lifting mechanism includes: a lifting portion housed in the storage portion; a connecting member passing through a slit formed in the baffle and connecting the lifting portion to the port door; and a drive mechanism equipped with a drive source housed in the storage portion, for raising and lowering the lifting portion between a first position and a second position, wherein the lifting portion has a space at the second position into which the drive source can enter, the second position being a position where the lifting portion overlaps with the drive source in a side view and a position where the space overlaps with the drive source in a top view.

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