Device alignment for correcting substrate angle

Abstract

The present application discloses an apparatus and a method for performing device alignment on a substrate. The apparatus comprises at least one camera mounted opposite the substrate to capture at least one image of at least a portion of a plurality of constructed devices on the substrate; and a device aligner to align substrate based on the at least portion of the constructed devices, wherein the device aligner is configured to detect a pattern of the at least portion of the plurality of constructed devices from the at least one image, generate an alignment offset correction based on the detected pattern, and align the substrate based on the alignment offset correction.

Images