Method and system for detection of bevel edge

Abstract

The present application provides a method and system of detecting a presence and location of a beveled edge of a substrate. The disclosure utilizes a kernel to accurately identify the boundary between a surface zone and a beveled edge on a substrate. The method comprises moving the substrate in an inspection tool; capturing, at the inspection tool and in digital form an initial image of the beveled edge of the substrate; generating a filtered image by filtering the initial image using a kernel having a shape substantially matching an expected shape of the beveled edge; and identifying a line in the filtered image representing the beveled edge by applying a line detection algorithm to the filtered image.

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