Wafer holding device

Abstract

The present invention provides a wafer holding device that can move a wafer contained in a covered container into a wafer holder in a small and simple structure. A wafer holding device 200 includes: a wafer holder 30; and a wafer loading mechanism 100 for loading a wafer conveyor 90 from a receiving container 80 into the wafer holder 30. The wafer loading mechanism 100 includes: a loading arm 50 disposed above the wafer holder 30 for loading the wafer conveyor 90 from the receiving container 80; a cover loading / unloading unit 40 disposed below the wafer holder 30 or above the loading arm 50 for loading / unloading the cover 82 of the receiving container; a loading port 60 disposed in front of the wafer holder 30 for placing the receiving container 80 on its upper surface; and a lifting mechanism 70 for moving the loading port 60 vertically between a first position where the receiving container 80 faces the cover loading / unloading unit 40 and a second position where the receiving container 80 faces the loading arm 50.

Images