Lift pin assembly for substrate processing chamber

Abstract

Lift pin assemblies and substrate processing chambers including the lift pin assemblies are disclosed. The lift pin assembly comprises outer lift pins movable by an outer lift platform, the outer lift pins positioned to raise and lower through and outer periphery of a substrate support. The lift pin assembly further comprises inner lift pins movable by an inner lift platform, the inner lift pins positioned to raise and lower through an inner periphery of the substrate support, the inner lift pins and the outer lift pins positioned and configured to raise and lower a warped substrate from the substrate support.

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