Electrostatic chuck device and rotating body

Abstract

An electrostatic chuck device includes: a rotating body having an electrostatic chuck component and a rotating platform for holding the electrostatic chuck component, and capable of rotating circumferentially along a central axis passing through it; a base located in the direction of the central axis; and a rotating mechanism for rotating the rotating body circumferentially along the central axis. The electrostatic chuck component has: a dielectric substrate; an internal electrode enclosed in the dielectric substrate; and terminals connected to the internal electrode. The base has a conductive portion communicating with the internal electrode. The internal electrode has a first electrode and a second electrode. The terminals have: one or more first terminals connected to the first electrode; and one or more second terminals connected to the second electrode. The conductive portion has: a first conductive portion connected to the first terminal via a first conductive liquid; and a second conductive portion connected to the second terminal via a second conductive liquid. The terminals are arranged in a rotationally symmetrical manner relative to the central axis.

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