Substrate processing system, method of measuring state of substrate in substrate processing system, and non-transitory computer-readable medium for determining state of substrate transferring in substrate processing system

Abstract

A system and a process for monitoring substrates is disclosed. The system and process may include a gate valve, a robot configured to transfer a substrate from a first chamber to a second chamber through the gate valve, and a sensor array aligned with the gate valve. The sensor array may be configured to capture data of the substrate along a single dimension when the substrate is moved in view of the sensor array. The system and process may assist to provide a less complex and less time consuming way to fully inspect a wafer.

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