Evaluation methods for pattern formation and positional variation

Abstract

A method for forming an evaluation pattern and a method for evaluating positional variations are provided, which can accurately measure the effect of pattern density on the irradiation position of a beam. One aspect of the method for forming the evaluation pattern includes: a step of irradiating a sample with a beam of charged particles to draw a plurality of first patterns with different pattern densities; and a step of drawing a plurality of second patterns with different pattern densities such that, when combined with at least a portion of the aforementioned plurality of first patterns, the pattern densities of each pattern tend to be equal, thereby forming a plurality of evaluation patterns with equal pattern densities.

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