Information processing methods, information processing devices and computer programs

Abstract

This invention provides an information processing method, which easily identifies sensors whose measurement data is abnormal when an anomaly occurs in a substrate processing apparatus. The information processing apparatus of this embodiment acquires measurement data obtained from a plurality of sensors installed in the substrate processing apparatus according to a time series. Furthermore, based on the acquired measurement data, the information processing apparatus calculates the degree of anomalousness for each sensor at each time interval, and identifies an anomaly ranking for each sensor based on the degree of anomalousness at each time interval. Then, based on the identified anomaly ranking, the information processing apparatus generates a graph representing the time-varying nature of the degree of anomalousness of each sensor.

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