Chemical delivery apparatus and chemical delivery system

TW202636949APending Publication Date: 2026-09-01ASM IP HLDG BV
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Patent Information

Application Number
TW114151263
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-31
Filing Date
2025-12-26
Publication Date
2026-09-01

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    Figure TWG2TA001075038_003
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Abstract

Various embodiments of the present technology may provide an apparatus for chemical delivery that includes a transport tube comprising a domed region coupled to an end of a hollow cylinder; a first inlet coupled to and in fluid communication with the transport tube; a second inlet coupled to and in fluid communication with the transport tube; and a third inlet coupled to and in fluid communication with the transport tube; wherein the first, second and third inlets are arranged along a shared plane.
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