Ceramic heater

Abstract

[Problem] This invention discloses a ceramic heater capable of improving the heat uniformity of a plate. [Solution] The ceramic heater includes: a plate, a first heater layer built into the plate, a plurality of first power supply terminals, an annular second heater layer, a plurality of second power supply terminals, and a plurality of jumper layers. The plurality of jumper layers are connected to a corresponding second power supply terminal among the plurality of second power supply terminals, and are connected to the second heater layer via a corresponding connecting portion provided in a plurality of connecting portions of the second heater layer. A slit is formed in the plurality of jumper layers, which, in plan view, divides the jumper layers into a plurality of regions including: a first region including the innermost side of the first end connected to the second power supply terminal; and a second region including the outermost side of the second end connected to the connecting portion. The first region extends in a positive direction, and the regions other than the first region extend in a direction opposite to the inner region. The width of each of the plurality of regions is greater than the width of the resistive heating element forming the second heater layer.

Images