semiconductor wafers

TW202636995APending Publication Date: 2026-09-01KIOXIA CORP
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Patent Information

Application Number
TW114126630
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-20
Filing Date
2025-07-14
Publication Date
2026-09-01

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Abstract

This embodiment provides a semiconductor wafer capable of suppressing probe damage during semiconductor testing and accurately measuring the current flowing between wirings after testing. The semiconductor wafer of this embodiment includes: a test pattern wiring, comprising: a first test insulating film; a first test wiring and a second test wiring, which are equally disposed across the first test insulating film and electrically insulated from each other. A first lead wiring is electrically connected to the first test wiring and is wider than the first and second test wirings. A second lead wiring is electrically connected to the second test wiring and is wider than the first and second test wirings. A third lead wiring is electrically connected to the second lead wiring and is wider than the first and second test wirings. A fourth lead wiring is disposed midway through the third lead wiring and is narrower than the third lead wiring.
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