Coating apparatus and article manufacturing method

TW202637286APending Publication Date: 2026-09-16CANON KK
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Patent Information

Application Number
TW115105728
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-25
Filing Date
2026-02-12
Publication Date
2026-09-16

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    Figure TWG2TA001077198_003
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Abstract

A coating apparatus for applying droplets to a substrate, includes a plurality of heads configured to discharge the droplets, a conveying mechanism configured to convey the plurality of heads in a first direction such that one head in the plurality of heads is arranged in a first region and another head in the plurality of heads is arranged in a second region, a moving mechanism configured to move one head in the plurality of heads between the first region and a coating region, and a scanning mechanism configured to scan the substrate in the first direction such that the droplets are applied to the substrate by the head arranged in the coating region in the plurality of heads, wherein at least a part of the second region is arranged above the scanning mechanism.
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