Laser processing apparatus

Abstract

A laser processing apparatus is disclosed. The disclosed laser processing apparatus may include: a laser light source that emits a plurality of laser beams; a homogenizing optical system that forms laser beams having a uniform energy distribution; an imaging optical system that images the laser beams emitted from the homogenizing optical system onto a workpiece; and a beam monitoring unit configured to measure the beam profile and beam alignment state of each of the plurality of laser beams before the plurality of laser beams emitted from the laser light source are incident on the homogenizing optical system.

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