Information processing device

Abstract

The information processing apparatus (3) of the present invention performs a first mathematical optimization, which takes multiple substrate processing units and substrate transport units as objects, and does not use the exclusive processing condition of selecting one of the two processes as a constraint condition for mathematical optimization, so as to determine the start time of various processes performed on the substrate, and then determines the substrate processing unit or substrate transport unit that cannot perform the processes simultaneously based on the result. Then, a second mathematical optimization is performed, which takes the substrate processing unit or substrate transport unit that is determined to perform the processes that cannot be performed simultaneously as objects, and adds the exclusive processing condition of determining which of the two processes that cannot be performed simultaneously among the various processes performed on the substrate is preferred to the constraint condition of the first mathematical optimization, so as to determine the start time of various processes performed on the substrate.

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