Device for opening cassette, method of operating the same and semiconductor processing apparatus

Abstract

A device for opening a cassette for storing a plurality of wafers is disclosed. The device comprises a housing containing an inner volume, the inner volume comprising a first door position and a second door position adjacent to the first door position; a docking port in the housing for coupling to a cassette; a door opener configured to couple to a door of the cassette and to translate the door within the housing between the first door position and the second door position; a purge gas diffuser located adjacent to the first door position such that the first door position is between the second door position and the purge gas diffuser. The purge gas diffuser is configured to provide a flow of purge gas to the inner volume towards the second door position.

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