Method for operating semiconductor processing system

Abstract

A method for operating a semiconductor processing system is provided. The method includes performing a semiconductor process by a semiconductor fabrication apparatus, wherein the semiconductor fabrication apparatus comprises a plurality of load ports arranged substantially along a first direction in a top view; moving a stage between a first region and a second region substantially along a second direction intersecting the first direction in the top view, wherein the stage supports a transfer robot, and the first region is nearer to the load ports than the second region is; using the transfer robot, transferring a wafer carrier between a stocker apparatus and a semiconductor fabrication apparatus when the stage is at the first region; and performing a maintenance process to the semiconductor fabrication apparatus when the stage is at the second region.

Images