MEMS electrostatic actuator blade configurations and methods of manufacture

TW202637459APending Publication Date: 2026-09-16CALIENT AI INC
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Patent Information

Application Number
TW114142455
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-01
Filing Date
2025-10-31
Publication Date
2026-09-16

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Abstract

Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.
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