Inhibitor composition, inhibitor pattern formation method, compound, acid generating agent and acid diffusion control agent

Abstract

An inhibitor composition that generates acid upon exposure and whose solubility in a developer changes due to the acid, and contains a compound comprising a cation (CO) represented by the following general formula (CO). In the formula, R1 is a substitutable hydrocarbon group, X is a halogen atom, R2 is a substitutable hydrocarbon group, Ar1 and Ar2 are each independently a substitutable aryl group, and n is an integer from 0 to 3.