Composition, precursor vessel, method and system for depositing material
TW202637564APending Publication Date: 2026-09-16ASM IP HLDG BV
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Patent Information
- Application Number
- TW114150127
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-24
- Filing Date
- 2025-12-19
- Publication Date
- 2026-09-16
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Figure TWG2TA001076846_001 
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Abstract
and: - wherein R1 and R2 are each independently selected from C1 to C8 alkyl groups, and wherein R3 is a C2 to C8 alkyl group, or - wherein R1 together with R2 and N forms a four to nine membered ring, and: R3 is selected from C1 to C8 alkyl groups, or R3 together with R2 and N forms a four to nine membered ring.
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