Fluoropolymer sheets, their manufacturing methods and metal-coated fluoropolymer sheets

Abstract

This invention relates to a fluororesin sheet comprising a hot-melt fluororesin and thermally conductive inorganic particles. The sheet contains 5 vol% to 95 vol% of the aforementioned thermally conductive inorganic particles by volume. Of the inorganic particles, at least 10 vol% are flake-like or aggregated BN particles, and the remaining inorganic particles are selected from at least one shape chosen from the group consisting of spherical, fragmented, polygonal, and amorphous particles. Furthermore, the sheet exhibits a higher thermal conductivity in the planar direction than in the thickness direction. This provides a fluororesin sheet with high planar thermal conductivity and high heat dissipation for semiconductor substrates, a method for manufacturing the sheet, and a metal-coated fluororesin substrate containing the sheet. none

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