Liquid source device and semiconductor processing equipment

Abstract

This application provides a liquid source device and a semiconductor processing equipment. The liquid source device includes: a liquid source bottle; a liquid level detection member, which is located inside the liquid source bottle and is used to detect the height of the liquid level in contact with its outer peripheral surface, the liquid level detection member having multiple detection positions; and a flow-stabilizing cylinder, which is sleeved outside the liquid level detection member, the flow-stabilizing cylinder being provided with a first opening and a second opening, the position of the first opening being higher than the highest detection position of the liquid level detection member, and the height of the bottom end of the second opening being lower than the lowest detection position of the liquid level detection member. This application utilizes the flow-stabilizing cylinder to buffer fluctuations of the liquid surface, so that the amplitude of fluctuations of the liquid surface inside the flow-stabilizing cylinder can be much smaller than that outside the flow-stabilizing cylinder, and even no fluctuation may occur inside the flow-stabilizing cylinder, thereby reducing the detection error of the liquid level detection member.

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