A flow delivery system for a processing chamber

TW202637881APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information

Application Number
TW114147487
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-04
Filing Date
2025-12-04
Publication Date
2026-09-16

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Abstract

A model of a processing chamber with a multiport gas injection unit is used to perform simulated process conditions based on different combinations of parameter values. The simulated process conditions correspond to different measurements of a process variable, such as a flow skew or flow rate. Based on the simulations, the flow rate through the multiport gas injection unit may be adjusted to minimize the flow skew in the processing chamber.
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