Batch-type substrate processing apparatus

Abstract

The present disclosure relates to a batch-type substrate processing apparatus having improved exhaust performance. The batch-type substrate processing apparatus includes a process tube extending in a vertical direction to provide a processing space in which a plurality of substrates are accommodated in multiple stages, a flange part provided at a lower end of the process tube and having a hollow communicating with the processing space, and an exhaust port assembly provided at one side of the flange part and communicating with the hollow to exhaust the inside of the processing space. The exhaust port assembly may include an inlet line part extending outward from one side of the flange part and provided with an inlet communicating with the hollow, and an exhaust pipe adapter having one end connected to the inlet line part and the other end provided with an outlet having a shape different from that of the inlet.

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