Inlet pipe and furnace tube equipment

TW202637885APending Publication Date: 2026-09-16ACM RES (SHANGHAI) INC +1
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Patent Information

Application Number
TW115109239
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-13
Filing Date
2026-03-12
Publication Date
2026-09-16

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Abstract

This disclosure discloses an air inlet pipe and a furnace tube device. The air inlet pipe includes an air inlet end and an end end, and multiple air outlets are distributed between the air inlet end and the end end. The air outlet angle of the air outlet near the air inlet end is greater than that of the air outlet near the end end. The air outlet angle is the angle between the opening direction of the air outlet and a reference line. The reference line is the horizontal line connecting the center of the air inlet pipe and the center of the substrate in the furnace tube device.
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