Process modules including independently operable lift mechanisms and semiconductor processing systems including such process modules

Abstract

A process module configured for performing concurrent epitaxial deposition of material layers is disclosed. The process module includes a common chamber housing having a support framework. Within the housing, two chamber bodies are laterally spaced and positioned above each chamber body are upper lamp housings. The process module features lift assemblies configured to independently lift the lamp housings to provide access to the lamps within. Semiconductor processing system including process modules having independent lift assemblies are also disclosed.

Images