Precursor delivery device with heating element and related methods

TW202637891APending Publication Date: 2026-09-16ENTEGRIS INC
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Patent Information

Application Number
TW114110215
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-11
Filing Date
2025-03-19
Publication Date
2026-09-16

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Abstract

Described are precursor delivery ampoules that are useful for delivering gaseous precursor to a semiconductor manufacturing process, the delivery ampoules including a three-dimensional heating element that provides effective delivery of heat energy to the ampoule interior while having a small volume relative to the ampoule interior, as well as methods of making and using the heating element as part of a precursor delivery ampoule.
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