Pad conditioner to delay crevice corrosion

TW202637896APending Publication Date: 2026-09-16NIWA DAIYAMONDO INDS
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Patent Information

Application Number
TW115107145
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-12-31
Filing Date
2026-02-26
Publication Date
2026-09-16

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Abstract

A polishing pad dresser for delaying crevice corrosion is proposed, which improves polishing yield and quality while preventing polishing particles from detaching. The dresser includes: a growth coating bonded to the polishing particles; a corrosion-resistant layer on the growth coating to prevent crevice corrosion at the interface between the polishing particles and the growth coating; and a protective layer on the corrosion-resistant layer to protect it.
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