Thief cartridge, electroplating system using the same and method of assembling the same
TW202637902APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114143268
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-06
- Filing Date
- 2025-11-06
- Publication Date
- 2026-09-16
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Figure TWG2TA001076392_001 
Figure TWG2TA001076392_002 
Figure TWG2TA001076392_003
Abstract
Exemplary thief cartridges for an electroplating system may include a first body defining a thief electrode channel. The cartridges may include a second body defining a thief chamber. The cartridges may include at least one thief membrane disposed between and separating the thief electrode channel and the thief chamber. A collective thickness of the at least one thief membrane may be at least
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