Method for removing expansion bolt for semiconductor processing apparatus

TW202637942APending Publication Date: 2026-09-16TSMC CHINA COMPANY +1
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114116209
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-12
Filing Date
2025-04-29
Publication Date
2026-09-16

Smart Images

  • Figure TWG2TA001076086_001
    Figure TWG2TA001076086_001
  • Figure TWG2TA001076086_002
    Figure TWG2TA001076086_002
  • Figure TWG2TA001076086_003
    Figure TWG2TA001076086_003
Patent Text Reader

Abstract

A method includes following steps. A washer and a nut are removed from a threaded rod of an expansion bolt that is secured to a drilled hole. After removing the washer and the nut, foot of a semiconductor processing apparatus is removed from the threaded rod. The washer and the nut are placed back to the threaded rod of the expansion bolt. A lifting fork of a bolt lifter is moved such that fingers of the lifting fork are located directly below the washer. The lifting fork is lifted, by using a hydraulic cylinder, to extract the washer, the nut, and the threaded rod of the expansion bolt away from the drilled hole.
Need to check novelty before this filing date? Find Prior Art