Lubricating a rail interface

TW202637950APending Publication Date: 2026-09-16APPL MATERIALS ISRAEL LTD
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Patent Information

Application Number
TW114139218
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-05
Filing Date
2025-10-13
Publication Date
2026-09-16

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Abstract

A system for lubricating a rail interface that is located within a vacuum chamber, the system includes (a) a lubricant reservoir that is configured store up to a defined amount lubricant that is suffice for performing multiple lubrication iterations; and (b) a lubricant delivery unit that is configured to selectively provide a lubricant suffice for performing a lubrication iteration, using gravity, to a lubricant inlet that is fluidly coupled to one or more parts of the rail interface.
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