Piezoelectric actuator, valve and flow control device

Abstract

A piezoelectric actuator comprise a piezoelectric element, a cap provided to cover the upper end of the piezoelectric element, a through hole formed in the cap and having a threaded hole, an adjustment screw threaded into the threaded hole, a lock nut threaded into the adjustment screw, two grooves formed on each of a pair of widthwise side surfaces of the cap perpendicular to the longitudinal direction of the cap in a planar view, and two cables whose entire length is housed in each of the two grooves so as to be electrically connected to the piezoelectric element, and the two grooves are formed so as not to be aligned on a straight line that passes through the center of the threaded hole and extends along the widthwise direction in a planar view.

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