vacuum drying device

Abstract

This invention dries workpieces by drawing gas into a drying chamber to reduce pressure within the chamber. Specifically, the depressurization drying device 10 includes: a first housing 11 and a second housing 12, which are assembled and disassembled by relative movement; and a depressurization unit 14 for depressurizing the drying chamber 13 formed between the assembled first housing 11 and second housing 12. At least one of the first housing 11 and the second housing 12 is a movable housing that moves for the aforementioned relative movement. The depressurization unit 14 includes a depressurization mechanism 15 and a suction piping section 16 connecting the depressurization mechanism 15 to the drying chamber 13. The suction piping section 16 includes: a fixed piping 17 connected to the depressurization mechanism 15; and a movable piping 18 connected to the movable housing 11 and moving together with it. By moving the movable housing 11, the movable piping 18 switches between a connected state connected to the fixed piping 17 and an open state separated from the fixed piping 17.

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