Substrate processing apparatus and method

Abstract

A substrate processing apparatus includes: a frame arranged to hold a substrate container; a substrate transport arm having an end effector with an automatically variable grip with substrate contacts positioned to set a grip distance between the substrate contacts; a sensor that sensory interfaces at least one of the substrate container and a substrate within the substrate container, and generate sensor output data that informs at least a substrate bow or warp condition of the substrate; and a controller configured to: register container data that characterizes container shelf dimensions so as to define a container shelf map and determine positon of the substrate contacts based on the determined at least one shelf dimension of a corresponding container shelf supporting a respective selected substrate and generate a command to vary the position of the substrate contacts, bespoke to the selected substrate, based on the determined at least one shelf dimension.

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